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special technologies

Co-axial lighting

IMAGE SENSOR With Coaxial Illumination the light is on the axis of the optical path and is therefore only illuminating the part of the sample that is
also seen by the microscope. Inside the Dino-Lite co-axial models there is an LED built-in on the side. This LED shines its light onto
a mirror which acts like a beam splitter that projects the light directly onto the sample and also allows the image that is formed to
LED
BEAM SPLITTER be returned straight up to the Edge sensor. The most commonly used application for coaxial illumination in the semiconductor
industry is the quality control and inspection wafer plates. With standard brightfi eld illumination the structures and overlaying
LENS structures are not all visible, while with coaxial illumination these details will appear. Other applications are the inspection of
polished and chemically treated metal surfaces, inspection of microchips, microelectronics and many other surfaces that appear
fl at or without contrast when using brightfi eld illumination.

SPECIMEN The following models include Co-axial lighting: AM7515MT2A/ AM7515MT4A / AM7515MT8A

Standard lighting Co-axial illumination Standard lighting Coaxial illumination
Co-axial

lighting

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